• Technical Conference: 

    09 – 14 May 2021

  • Exhibition: 

    10 – 14 May 2021

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Post Session


C UV and Soft X-ray

Presider: Oleg Khodykin, KLA Corporation

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Light for the Nanoworld – Applications of EUV Compact Sources in Future Lithography and Metrology (AM4Q.1)
Presenter: Larissa Juschkin, Forschungszentrum Jülich, KLA Corporation

Sources of extreme ultraviolet and soft x-ray radiation enable manufacturing and probing nanostructures in 3D with natural contrast, that is crucial for nm-scale lithography, inspection and metrology. This talk highlights imaging applications with laboratory sources.

Authors:Larissa Juschkin, Forschungszentrum Jülich, KLA Corporation

GaAs Detector Array for Soft X-ray Beam Position Monitoring in Storage Ring Light Sources (AM4Q.2)
Presenter: Jinghe Liu, Stony Brook University

We describe a GaAs detector array for soft-Xray photons with energies above 250 eV designed to operate with power density levels of up to 20 W/mm2 to be used in a novel beam position monitor.

Authors:Jinghe Liu, Stony Brook University / Kevin Kucharczyk, Stony Brook University / Ricardo Lutchman, Stony Brook University / Dmitri Donetsky, Stony Brook University / Claudio Mazzoli, Brookhaven National Laboratory / Boris Podobedov, Brookhaven National Laboratory


Ultra Close Range Localized Surface Plasmon Coupling With Multiple Quantum Well Towards Photoluminescence Intensity Enhancement of Micro-LED (AM4Q.3)
Presenter: Zaifa Du, Beijing University Of Technology

A strategy for the application of localized surface plasmon to Micro-LED is proposed in this paper. The quantum wells region is exposed by direct etching and Ag nanoparticles is used to generate localized surface plasmon.

Authors:Zaifa Du, Beijing University Of Technology / Weiling Guo, Beijing University Of Technology / Le Wang, Beijing University Of Technology / Fangzhu Xiong, Beijing University Of Technology / Penghao Tang, Beijing University Of Technology / Jie Sun, Fuzhou University


Demonstration of Tunable High Q Aluminum Nitride on Sapphire Microring Resonator at Green and UV Wavelengths (AM4Q.4)
Presenter: Walter Shin, University of Michigan

We demonstrate aluminum nitride on sapphire microring resonators at green and ultraviolet wavelength and measured record high quality factors of 147,000 at 532nm and 25,500 at 369.5nm based on thermo optic-effect.

Authors:Walter Shin, University of Michigan / Yi Sun, University of Michigan / Mohammad Soltani, Raytheon / Zetian Mi, University of Michigan


Self-Powered Ultraviolet-Photodetectors Based on Molecular Beam Epitaxy-Grown AlGaN Quantum-Disks Nanowires (AM4Q.5)
Presenter: Chen Huang, Univ of Science and Technology of China

We have fabricated the novel ultraviolet-photodetectors using AlGaN quantum-disks nanowires. The device responses to 254 nm light sensitively and exhibits a high on/off ratio, a large responsivity, and a fast recovery speed under 0 V.

Authors:Chen Huang, Univ of Science and Technology of China / Fangzhou Liang, Univ of Science and Technology of China / Haiding Sun, Univ of Science and Technology of China


Recent Progress of High-Efficiency AlGaN Deep-UV LED (AM4Q.6)
Presenter: Hideki Hirayama, RIKEN

High-efficiency AlGaN-based deep-ultraviolet light-emitting diodes (deep-UV LEDs) are demonstrated by enhancing light-extraction effiiency (LEE). The external quantum efficiency (EQE) reached to 20.3% by introducing transparent p-type AlGaN contact layer and highly reflective electrode.

Authors:Hideki Hirayama, RIKEN