• An In-Person-Only Event
  • Technical Conference:  07 – 12 May 2023
  • The CLEO Hub: 09 – 11 May 2023

Solid-State Based Quantum Optics Enabled by Focused Ion Beam Implantation: Applications & Challenges


Michael Titze, Purdue University, USA
Stefano Lagomarsino, Universitaet Siegen, Germany
Mason Marshall, National Institute of Standards & Technology, USA

Solid-state based quantum computing relies on artificial atoms, often realized through embedding impurity atoms in an otherwise clean crystal environment. While incorporation of atoms during crystal growth can give rise to high-quality photon emitters, the lack of positional control makes scaling of this approach exceptionally difficult. Through the use of focused ion beam implantation, positional accuracy <(50 nm)3 can be achieved, sufficient for integration of emitters into photonic nanostructures. Tuning of the optical properties of emitters is achieved by adapting the ion species to the application. Current challenges in the field lie in the typically low ratio of optically active emitters to implanted ions preventing fully deterministic creation of emitters, as well as mitigation of damage introduced during the ion implantation.

This special symposium focuses on applications in solid state quantum optics realized using focused ion beam implantation and explores pathways of improving emitter yield and damage mitigation strategies.

Invited Speakers

Jennifer Choy, University of Wisconsin-Madison, USA
Modeling and Fabrication of Diamond Color Center Arrays

Steven Cundiff, University of Michigan, USA
Optical Multidimensional Coherent Spectroscopy of Silicon Vacancy Centers in Diamond

Kai-Mei Fu, University of Washington, USA
Formation of Donor Qubits in ZnO by Indium Ion Implantation

Michael Hollenbach, Helmholtz-Zentrum Dresden-Rossendorf, Germany
Ion-induced Telecom Single-Photon Emitters in Silicon

Hebin Li, Florida International University, USA
Optical 2D Coherent Spectroscopy for Probing Interaction and Correlation in Quantum Emitters

Andrew Mounce, Sandia National Laboratory, USA
Focused Ion Beam Implantation for Nitrogen-Vacancy Quantum Sensing Optimization

Meenakshi Singh, Colorado School of Mines, USA
Fabrication and Characterization of Defects in Silicon Allotropes for Quantum Information Science

Jelena Vuckovic, Stanford University, USA
Scalable Semiconductor Quantum Systems in Diamond and Silicon Carbide