• Technical Conference: 

    09 – 14 May 2021

  • Exhibition: 

    10 – 14 May 2021

Light-based Micro & Nano Manufacturing


Maria Farsari, IESL-FORTH, Greece


Recent progress in high-resolution manufacturing technologies, combined with the development of tailor-made materials has allowed the implementation of 2D &3D micro/nano architectures in a variety of applications. These include redistribution layer structuring, lab-on-a-chip, light-emitting diodes, lasers, waveguides, optical sensors, photonic crystals and metamaterials, micro-optical components, and tissue engineering. To this end, lasers, and light sources in general, have proved to be an indispensable tool, as they can be focused and directed very accurately using conventional optics, and they can achieve sub-10nm resolution, bypassing the diffraction limit by employing multi-photon processes. This special session in dedicated to light-based micro & nano manufacturing, the available technologies, the materials used, and its applications:


  • 2D & 3D micro/nano printing
  • Direct Laser Writing
  • Nano-imprint Lithography
  • Materials for micro/nano manufacturing

Invited Speakers

Mangirdas Malinauskas, Vilniaus Universitetas, Lithuania

Emmanuel Stratakis, Inst. of Electronic Structure & Laser, Greece

Ioanna Zergioti, National Technical University of Athens, Greece