• Technical Conference: 

    15 – 20 May 2022

  • Exhibition: 

    17 – 19 May 2022

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Poster

Arrays of Microplasma-Assisted Atomic Layer Deposition and Etching Free Patterning of Ga2O3 Thin Film With Flexible DUV Photodetector (JTu3A.86)

Presenter: Jinhong Kim, University of Illinois Urbana Champaign

Microplasma arrays assisted atomic layer deposition (MALD) have been used to deposit gallium oxide (Ga2O3) thin film on the rigid and flexible substrate in order to fabricate deep-ultraviolet (DUV) photodetector under 254 nm illumination.

Authors:Jinhong Kim, University of Illinois Urbana Champaign / Andrey Mironov, University of Illinois Urbana Champaign / Dane Sievers, University of Illinois Urbana Champaign / Sung-jin Park, University of Illinois Urbana Champaign / J. Gary Eden, University of Illinois Urbana Champaign


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