• Technical Conference: 

    15 – 20 May 2022

  • Exhibition: 

    17 – 19 May 2022

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Poster

Ultra-High Q Silica Microcavity Fabrication Using Conventional Photolithography Combined With Chemo-Mechanical Polishing (JTu3A.85)

Presenter: Shahin Honari, University of Victoria

We fabricated ultrahigh Q silica microdisks using conventional photolithography followed by chemo-mechanical polishing. Through this procedure, optical quality factor exceeding one hundred million was obtained.

Authors:Shahin Honari, University of Victoria / Sanaul Haque, University of Victoria / Tao Lu, University of Victoria


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