• Technical Conference: 

    15 – 20 May 2022

  • Exhibition: 

    17 – 19 May 2022

Home > e-Posters > Poster


Ultra-High Q Silica Microcavity Fabrication Using Conventional Photolithography Combined With Chemo-Mechanical Polishing (JTu3A.85)

Presenter: Shahin Honari, University of Victoria

We fabricated ultrahigh Q silica microdisks using conventional photolithography followed by chemo-mechanical polishing. Through this procedure, optical quality factor exceeding one hundred million was obtained.

Authors:Shahin Honari, University of Victoria / Sanaul Haque, University of Victoria / Tao Lu, University of Victoria

Poster Presentation

Authentication Required

Access to poster content is available to logged in registered attendees, please login now to participate.