• Technical Conference: 

    15 – 20 May 2022

  • Exhibition: 

    17 – 19 May 2022

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Poster

Optical Nano-Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence (JW1A.65)

Presenter: Carolina Rendón-Barraza, Nanyang Technological University

We experimentally demonstrate that a linear dimension of a sub-wavelength nanoscale object can be measured with an accuracy better that λ/250 by a deep-learning-enabled examination of its diffraction pattern.

Authors:Carolina Rendón-Barraza, Nanyang Technological University / Eng Aik Chan, Nanyang Technological University / Guanghui Yuan, Nanyang Technological University / Giorgio Adamo, Nanyang Technological University / Tanchao Pu, University of Southampton / Nikolay Zheludev, University of Southampton


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