Exhibitor Press Releases

4/19/2010

XYZ Piezo Flexure Nanopositioning Scanning Stage for Micromanufacturing / Nanomanipulation

XYZ Piezo Flexure Nanopositioning Scanning Stage for Micromanufacturing / Nanomanipulation

PI’s P-563.3CD PIMars™ is a long-travel XYZ piezo flexure-guided scanning / nanomanipulation system. The unit enables precision motion control with resolution in the nanometer realm and 340x340x340 µm travel in XYZ, significantly more than other capacitive feedback equipped systems currently provide. Integrated capacitive feedback and closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

Typical Applications: Micromanufacturing, Bio-Technology, Nanotechnology, SNOMs, AFM & SPM Scanning Microscopy, Nano-Manipulation, Nano-Imprint, Semiconductor & Data-Storage Test Equipment.

Drawings, Datasheet, more Information available at:
http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=201550

See also attached application story “PIMars™ in NanoScribe’s Nanostructuring” 3D Laser Lithography system.